Patent Assignment
Reel/Frame 039844/0509
Assignment of Assignor's Interest
Recorded: 2016-09-23
Pages: 6
Assignors
NITTA, TAKAFUMI
Executed: 2016-09-05
SHIMAMOTO, SATOSHI
Executed: 2016-09-05
HIROSE, YOSHIRO
Executed: 2016-09-02
Assignee
HITACHI KOKUSAI ELECTRIC INC
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.