Patent Assignment
Reel/Frame 025810/0964
Assignment of Assignor's Interest
Recorded: 2011-02-15
Pages: 4
Assignors
NABETA, KAZUYA
Executed: 2010-12-22
UKAE, NAOKI
Executed: 2010-12-22
TAKESHITA, MITSUNORI
Executed: 2010-12-22
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.