Substrate processing apparatus and a method of manufacturing a semiconductor device
The temperature of a substrate is elevated rapidly while improving the temperature uniformity of the substrate. The substrate is loaded into a process chamber, the loaded substrate is supported on a first substrate support unit, a gas is supplied to the process chamber, the temperature of the substrate supported on the first substrate support unit is elevated in a state of increasing the pressure in the process chamber to higher than the pressure during loading of the substrate or in a state of increasing the pressure in the process chamber to higher than the pressure during processing for the surface of the substrate, the substrate supported on the first substrate support unit is transferred to the second substrate support unit and supported thereon after lapse of a predetermined time, and the surface of substrate is processed while heating the substrate supported on the second substrate support unit.
1. A method of processing a substrate comprising steps of:
loading a substrate into a process chamber,
supporting the substrate loaded into the process chamber above a predetermined distance apart from a suceptor by a substrate support unit,
elevating the temperature of the substrate supported the predetermined distance apart from the suceptor by the substrate support unit, by a heating unit established in the suceptor during a predetermined time in the state of providing pressure in the process chamber that is higher than the pressure in the step of loading the substrate before transferring the substrate to the suceptor,
transferring the substrate supported on the substrate support unit to the suceptor and supporting the substrate on a top surface of the suceptor after the step of elevating the temperature passed the predetermined time,
processing a surface of the substrate, transferred to the suceptor and supported on the top surface of the suceptor, by gas while heating by the heating unit in the state of supplying the gas into the process chamber and providing the pressure in the process chamber a predetermined pressure, and
unloading the substrate processed in the step of processing of the substrate from an inside of the process chamber.
2. The method of processing a substrate according to claim 1 , Wherein
in step of elevating the temperature of the substrate, the pressure in the process chamber is increased by supplying a gas from a gas supply unit to the process chamber.
3. The method of processing a substrate according to claim 2 , wherein
in step of elevating the temperature of the substrate, the process chamber is done for the predetermined pressure that is higher than the pressure in the step of loading the substrate by making the gas flow supplied in step of elevating the temperature of the substrate a predetermined value.
4. The method of processing a substrate according to claim 2 , wherein
the gas supplied in step of elevating the temperature of the substrate is a nitrogen gas.
5. The method of processing a substrate according to claim 1 , wherein
the gas supplied in step of elevating the temperature of the substrate is supplied between the substrate and the suceptor.
6. The method of processing a substrate according to claim 1 , wherein
in step of supporting the substrate, the predetermined distance between the substrate and the suceptor is adjusted according to a difference with the temperature of the substrate and the temperature of the susceptor.
7. The method of processing a substrate according to claim 6 , wherein
the predetermined distance between the substrate and the suceptor is reduced when a difference with the temperature of the substrate and the temperature of the susceptor is small, and
the predetermined distance between the substrate and the suceptor is raised when a difference with the temperature of the substrate and the temperature of the susceptor is big.
8. The method of processing a substrate according to claim 1 , wherein
in step of elevating the temperature of the substrate, further a top surface of the substrate is heated by a heating unit established above of the substrate.