Patent Assignment
Reel/Frame 037296/0663
Assignment of Assignor's Interest
Recorded: 2015-12-15
Pages: 2
Assignors
HAMANO, KATSUYOSHI
Executed: 2012-03-08
TSUBOTA, YASUTOSHI
Executed: 2012-03-08
TOMITA, MASAYUKI
Executed: 2012-03-08
YOSHINO, TERUO
Executed: 2012-03-08
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and a Method of Manufacturing a Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.