Statistical analysis method and substrate process system

1. A statistical analysis method for performing an analysis process on monitor data stored in a database, the monitor data received from a substrate processing apparatus configured to process a substrate, the method comprising:

receiving monitor data from the substrate processing apparatus;

producing representative value data based on the monitor data;

associating the representative value data with apparatus condition information indicating a condition of the substrate processing apparatus at a time of production of the monitor data;

storing the representative value data and the apparatus condition information associated with the representative value data in the database;

retrieving the representative value data and the apparatus condition information associated with the representative value data from the database;

comparing an exclusion parameter with the retrieved apparatus condition information, the exclusion parameter including information indicating whether the representative value data associated with the apparatus condition information should be included in statistical analysis targets; and

determining whether the retrieved representative value data are included in the statistical analysis targets, based on a comparison result produced by comparing the exclusion parameter with the apparatus condition information;

wherein when the information included in the exclusion parameter is changed, determining whether to include additional representative value data in the statistical analysis targets.

2. A substrate processing system, comprising:

a substrate processing apparatus configured to process a substrate; and

a group managing apparatus configured to communicate with the substrate processing apparatus, the group managing apparatus including:

a communication unit configured to receive monitor data from the substrate processing apparatus;

a monitor data receiving module configured to:

receive the monitor data from the communication unit; and

store the received monitor data in a storing unit;

a representative value producing module configured to:

retrieve the monitor data stored in the storing unit,

produce representative value data based on the monitor data,

associate the representative value data with apparatus condition information indicating a condition of the substrate processing apparatus at a time of production of the monitor data, and

store the representative value data and the apparatus condition information associated with the representative value data in the storing unit; and

a determination module configured to:

retrieve the representative value data and the apparatus condition information associated with the representative value data stored in the storing unit,

compare an exclusion parameter with the retrieved apparatus condition information, the exclusion parameter including information indicating whether representative value data associated with the apparatus condition information should be included in statistical analysis targets, and

determine whether the retrieved representative value data are included in the statistical analysis targets, based on a comparison result produced by comparing the exclusion parameter with the apparatus condition information;

wherein when the information included in the exclusion parameter is changed, determining whether to include additional representative value data in the statistical analysis targets.

3. The system of claim 2 , wherein the determination module is further configured to:

associate a determination result indicating whether the retrieved representative value data are included in the statistical analysis targets, based on the comparison result, with the representative value data, and

store the determination result associated with the representative value data in the storing unit.

4. A group managing apparatus configured to communicate with a substrate processing apparatus configured to process a substrate, the group managing apparatus comprising:

a communication unit configured to receive monitor data from the substrate processing apparatus;

a monitor data receiving module configured to:

receive the monitor data from the communication unit; and

store the received monitor data in a storing unit;

a representative value producing module configured to:

retrieve the monitor data stored in the storing unit,

produce representative value data based on the monitor data,

associate the representative value data with apparatus condition information indicating a condition of the substrate processing apparatus at a time of production of the monitor data, and

store the representative value data and the apparatus condition information associated with the representative value data in the storing unit; and

a determination unit configured to:

retrieve the representative value data and the apparatus condition information associated with the representative value data stored in the storing unit,

compare an exclusion parameter with the retrieved apparatus condition information, the exclusion parameter including information indicating whether representative value data associated with the apparatus condition information should be included in statistical analysis targets, and

determine whether the retrieved representative value data are included in the statistical analysis targets, based on a comparison result produced by comparing the exclusion parameter with the apparatus condition information;

wherein when the information included in the exclusion parameter is changed, determining whether to include additional representative value data in the statistical analysis targets.

5. The apparatus of claim 4 , wherein the determination unit is further configured to

associate a determination result indicating whether the retrieved representative value data are included in the statistical analysis targets, based on the comparison result, with the representative value data, and

store the determination result associated with the representative value data in the storing unit.

6. A non-transitory computer-readable recording medium storing a program that, when executed in a group management apparatus connected to a substrate processing apparatus configured to process a substrate, causes a computer to perform a process of:

storing monitor data received from the substrate processing apparatus in a computer-readable storing unit;

producing representative value data based on the monitor data:

associating the representative value data with apparatus condition information indicating a condition of the substrate processing apparatus at a time when the monitor data is produced;

storing the representative value data and the apparatus condition information associated with the representative value data in the computer-readable storing unit;

retrieving the representative value data and the apparatus condition information associated with the representative value data from the computer-readable storing unit; and

determining whether the retrieved representative value data should be included in statistical analysis targets by comparing an exclusion parameter with the retrieved apparatus condition information, the exclusion parameter including predetermined information indicating whether the retrieved representative value data associated with the apparatus condition information should be included in the statistical analysis targets;

wherein when the information included in the exclusion parameter is changed, determining whether to include additional representative value data in the statistical analysis targets.