Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
A semiconductor device manufacturing method, including: mounting substrates on a mounting table within a processing chamber along a rotation direction of the table; starting to supply a first-element-containing gas to a first region in the chamber along the rotation direction, while rotating the table and exhausting the processing chamber; starting to supply a second-element-containing gas to a second region in the chamber; starting to generate, by a plasma generating unit in the second region, plasma of the second-element-containing gas in the second region to have a first activity; and forming a thin film containing first and second elements on the substrates by rotating the table to cause the substrates to sequentially pass through the first and second regions in turn so that a first-element-containing layer is formed in the first region and is modified in the second region by generating plasma having a second activity higher than the first activity.
1. A method of manufacturing a semiconductor device, comprising:
mounting a plurality of substrates on a substrate mounting table rotatably installed within a processing chamber to process the substrates, the substrates being mounted along a rotation direction of the substrate mounting table;
starting to supply a first-element-containing gas to a first processing region defined within the processing chamber along the rotation direction of the substrate mounting table, while rotating the substrate mounting table and exhausting an interior of the processing chamber;
starting to supply a second-element-containing gas to a second processing region defined within the processing chamber;
performing a first processing to begin generating, by a plasma generating unit installed in the second processing region, plasma of the second-element-containing gas in the second processing region to have a first activity; and
performing a second processing to form a thin film containing a first element and a second element on each of the substrates by rotating the substrate mounting table to cause the substrates to sequentially pass through the first processing region and the second processing region a predetermined number of times in turn so that a first-element-containing layer is formed in the first processing region, and the first-element-containing layer is modified in the second processing region by generating plasma having a second activity that is higher than the first activity.
2. The method of claim 1 , wherein in the first processing, a pressure in the second processing region is set to be lower than a pressure in the second processing region in the second processing.
3. The method of claim 1 , wherein in the first processing, a pressure in the second processing region is set at a pressure at which the second-element-containing gas is diffused within the second processing region.
4. The method of claim 2 , wherein in the first processing, a pressure in the second processing region is set at a pressure at which the second-element-containing gas is diffused within the second processing region.
5. The method of claim 1 , wherein in the first processing, a pressure in the second processing region is gradually increased after starting to generate the plasma.
6. The method of claim 1 , further comprising,
performing a third processing, wherein in the third processing, a pressure in the second processing region is set to be lower than a pressure in the second processing region in the second processing, during a time period from completion of the second processing to an extinguishment of the plasma of the second-element-containing gas.