Patent Assignment
Reel/Frame 036628/0823
Assignment of Assignor's Interest
Recorded: 2015-09-23
Pages: 10
Assignors
UEDA, TATSUSHI
Executed: 2015-09-11
TANABE, JUNICHI
Executed: 2015-09-11
YAMAMOTO, KATSUHIKO
Executed: 2015-09-11
TAIRA, YUKI
Executed: 2015-09-11
OHASHI, NAOFUMI
Executed: 2015-09-11
ITATANI, HIDEHARU
Executed: 2015-09-11
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.