Patent Assignment
Reel/Frame 025906/0603
Assignment of Assignor's Interest
Recorded: 2011-03-06
Pages: 2
Assignor
SAENGER, INGO
Executed: 2011-02-09
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Polarization-Influencing Optical Arrangement and an Optical System of a Microlithographic Projection Exposure Apparatus
Application:
13/021,345 →
Publication:
US 2011/0194093