Patent Assignment
Reel/Frame 025914/0804
Assignment of Assignor's Interest
Recorded: 2011-03-08
Pages: 6
Assignors
XU, YONGCHUN
Executed: 2011-02-17
OUYANG, XU
Executed: 2011-02-22
SONG, YUNGSHENG
Executed: 2011-02-17
TING, TSO-HUI
Executed: 2011-02-17
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Wafer Alignment System with Optical Coherence Tomography