Patent Assignment
Reel/Frame 025922/0245
Assignment of Assignor's Interest
Recorded: 2011-02-22
Pages: 3
Assignee
SEMES CO, LTD
#278, MOSI-RI, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate-Processing Apparatus and Method of Transferring Substrate in the Same