Patent Assignment
Reel/Frame 025939/0551
Assignment of Assignor's Interest
Recorded: 2011-03-11
Pages: 4
Assignors
HUANG, CHENG-I
Executed: 2011-03-10
CHAO, HSIAO-SHU
Executed: 2011-03-10
CHENG, YI-KAN
Executed: 2011-03-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Rc Extraction for Single Patterning Spacer Technique