Patent Assignment
Reel/Frame 025947/0616
Assignment of Assignor's Interest
Recorded: 2011-03-14
Pages: 4
Assignors
FUKUSHIMA, MAKOTO
Executed: 2011-03-04
TOGAWA, TETSUJI
Executed: 2011-03-04
SAITO, SHINGO
Executed: 2011-03-04
INOUE, TOMOSHI
Executed: 2011-03-04
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU,, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Method and Apparatus for Polishing a Substrate