Patent Assignment
Reel/Frame 025950/0848
Assignment of Assignor's Interest
Recorded: 2011-03-08
Pages: 3
Assignors
HUANG, JUN-CHI
Executed: 2011-02-18
TSAO, PO-CHAO
Executed: 2011-02-18
WEI, MING-TE
Executed: 2011-02-18
Assignee
UNITED MICROELECTRONICS CORP.
NO. 3, LI-HSIN RD. II, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, R.O.C., TAIWAN
Covered Property
(1)
Mark Structure and Method for Measuring Alignment Accuracy Between Former Layer and Latter Layer