Patent Assignment
Reel/Frame 025969/0160
Assignment of Assignor's Interest
Recorded: 2011-03-16
Pages: 3
Assignor
KOBAYASHI, YOSHIYUKI
Executed: 2011-03-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Mounting and Demounting Method