Patent Assignment
Reel/Frame 025972/0656
Assignment of Assignor's Interest
Recorded: 2011-03-17
Pages: 6
Assignors
MANN, HANS-JUERGEN
Executed: 2011-03-04
SCHOEPPACH, ARMIN
Executed: 2011-03-03
ZELLNER, JOHANNES
Executed: 2011-03-16
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithographic Imaging Optical System Including Multiple Mirrors