Patent Assignment
Reel/Frame 025973/0924
Assignment of Assignor's Interest
Recorded: 2011-03-17
Pages: 5
Assignee
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
NO. 3 BEITUCHENG WEST ROAD, CHAOYANG DISTRICT, BEIJING, 100029, CHINA
Covered Property
(1)
Contact Hole, Semiconductor Device and Method for Forming the Same