Patent Assignment
Reel/Frame 025978/0251
Assignment of Assignor's Interest
Recorded: 2011-03-18
Pages: 3
Assignor
HAYASHI, DAISUKE
Executed: 2011-01-07
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Electrode Used Therein