Patent Assignment
Reel/Frame 025980/0297
Assignment of Assignor's Interest
Recorded: 2011-03-18
Pages: 4
Assignors
ZIBOLD, AXEL
Executed: 2011-02-28
KUSCHNERUS, PETER
Executed: 2011-03-02
KIENZLE, OLIVER
Executed: 2011-03-10
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, D-07745, GERMANY
Covered Property
(1)
Method for Repairing Phase Shift Masks
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.