Patent Assignment
Reel/Frame 025989/0354
Assignment of Assignor's Interest
Recorded: 2011-03-21
Pages: 2
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Optical Imaging Device with Image Defect Determination