Patent Assignment
Reel/Frame 026005/0391
A Modifying Conversion
Recorded: 2011-03-23
Pages: 6
Assignor
CARL ZEISS SMT AG
Executed: 2010-10-14
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device and Method for the Optical Measurement of an Optical System by Using an Immersion Fluid
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.