Patent Assignment
Reel/Frame 026048/0544
Assignment of Assignor's Interest
Recorded: 2011-03-30
Pages: 3
Assignors
YAMASHITA, JUN
Executed: 2011-03-25
ISA, KAZUHIRO
Executed: 2011-03-25
NAKAMURA, HIDEO
Executed: 2011-03-25
KITAGAWA, JUNICHI
Executed: 2011-03-25
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus