Patent Assignment
Reel/Frame 026066/0618
Corrective Assignment to Correct the Document Comprising Details of the Assignment. Previously Recorded on Reel 024406 Frame 0179. Assignor(S) Hereby Confirms the Assignment of Assignor's Interest (See Document for Details)..
Recorded: 2011-03-31
Pages: 17
Assignor
GODYAK, VALERY, DR.
Executed: 2010-01-26
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Properties
(3)
Inductive Plasma Source with High Coupling Efficiency
Plasma reactor with inductie excitation of plasma and efficient removal of heat from the excitation coil
Inductive Plasma Source with High Coupling Efficiency
Related Assignments
(4)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
May 19, 2010
From: GODYAK, VALERY
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 024406/0179 →
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →