Patent Assignment
Reel/Frame 026084/0823
Assignment of Assignor's Interest
Recorded: 2011-04-06
Pages: 4
Assignees
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
TOHOKU UNIVERSITY
2-1-1, KATAHIRA, AOBA-KU, MIYAGI, SENDAI-SHI, 980-8577, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method