Patent Assignment
Reel/Frame 026092/0251
Assignment of Assignor's Interest
Recorded: 2011-04-07
Pages: 3
Assignee
CORNING INCORPORATED
SP-TI-03-1, CORNING, NEW YORK, 14831
Covered Property
(1)
Plasma Ion Assisted Deposition of Mo/Si Multilayer Euv Coatings