Patent Assignment
Reel/Frame 026095/0508
Assignment of Assignor's Interest
Recorded: 2011-04-08
Pages: 4
Assignors
LEEWIS, CHRISTIAN MARINUS
Executed: 2009-03-10
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2009-03-10
VAN DE KERKHOF, MARCUS ADRIANUS
Executed: 2009-03-10
QUAEDACKERS, JOHANNES ANNA
Executed: 2009-03-11
MATTHEUS, CHRISTINE CORINNE
Executed: 2009-03-10
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Focus and Dose Measurement Using a 2-D Target