Assignment of Assignor's Interest

Recorded: 2011-04-13 Pages: 4

Assignors

AUTH, NICOLE

Executed: 2011-03-16

SPIES, PETRA

Executed: 2011-03-10

BECKER, RAINER

Executed: 2011-03-11

HOFMANN, THORSTEN

Executed: 2011-03-09

EDINGER, KLAUS

Executed: 2011-03-04

Assignee

CARL ZEISS SMS GMBH

CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY

Covered Property (1)

A Method for Electron Beam Induced Etching

Patent: 9,023,666 →

Application: 13/058,587 →

Publication: US 2011/0183444

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.