Patent Assignment
Reel/Frame 026114/0353
Assignment of Assignor's Interest
Recorded: 2011-04-13
Pages: 4
Assignors
AUTH, NICOLE
Executed: 2011-03-16
SPIES, PETRA
Executed: 2011-03-10
BECKER, RAINER
Executed: 2011-03-11
HOFMANN, THORSTEN
Executed: 2011-03-09
EDINGER, KLAUS
Executed: 2011-03-04
Assignee
CARL ZEISS SMS GMBH
CARL-ZEISS-PROMENADE 10, JENA, 07745, GERMANY
Covered Property
(1)
Method for Electron Beam Induced Etching of Layers Contaminated with Gallium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.