Patent Assignment
Reel/Frame 026126/0741
Assignment of Assignor's Interest
Recorded: 2011-04-14
Pages: 3
Assignors
SAWADA, IKUO
Executed: 2011-01-20
KANG, SONGYUN
Executed: 2011-01-20
KASAI, SHIGERU
Executed: 2011-01-20
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method