Patent Assignment
Reel/Frame 026147/0273
Assignment of Assignor's Interest
Recorded: 2011-04-19
Pages: 3
Assignor
SOCHA, ROBERT JOHN
Executed: 2011-03-09
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Design Rule Optimization in Lithographic Imaging Based on Correlation of Functions Representing Mask and Predefined Optical Conditions