Patent Assignment
Reel/Frame 026153/0924
Assignment of Assignor's Interest
Recorded: 2011-04-20
Pages: 3
Assignor
ITO, HIROHITO
Executed: 2010-12-16
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Positioning Apparatus, Exposure Apparatus, and Device Manufacturing Method