Patent Assignment
Reel/Frame 026156/0163
Assignment of Assignor's Interest
Recorded: 2011-04-20
Pages: 3
Assignor
GREENE, JOHN D.
Executed: 2011-03-25
Assignee
KLA-TENCOR CORPORATION
1 TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Methods and Apparatus for Optimization of Inspection Speed by Generation of Stage Speed Profile and Selection of Care Areas for Automated Wafer Inspection