Patent Assignment
Reel/Frame 026179/0669
Assignment of Assignor's Interest
Recorded: 2011-04-26
Pages: 3
Assignors
CARCASI, MICHAEL A.
Executed: 2011-04-21
RATHSACK, BENJAMIN M.
Executed: 2011-04-21
SOMERVELL, MARK H.
Executed: 2011-04-21
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Slimming Radiation-Sensitive Material Lines in Lithographic Applications