Patent Assignment
Reel/Frame 026183/0530
Assignment of Assignor's Interest
Recorded: 2011-04-26
Pages: 3
Assignor
UEDA, SHINTARO
Executed: 2011-04-25
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Atomic Layer Deposition For Controlling Vertical Film Growth