Patent Assignment
Reel/Frame 026185/0628
Assignment of Assignor's Interest
Recorded: 2011-04-27
Pages: 2
Assignor
YAMAZAKI, SHUNPEI
Executed: 2011-04-06
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device