Patent Assignment
Reel/Frame 026194/0742
Assignment of Assignor's Interest
Recorded: 2011-04-28
Pages: 4
Assignors
IIZUKA, HACHISHIRO
Executed: 2011-02-15
ABE, JUN
Executed: 2011-02-16
YOKOTA, AKIHIRO
Executed: 2011-02-16
OHSE, TAKESHI
Executed: 2011-03-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Shower Head