Patent Assignment
Reel/Frame 026206/0338
Assignment of Assignor's Interest
Recorded: 2011-05-02
Pages: 2
Assignors
KOBAYASHI, HIROYUKI
Executed: 2008-02-08
MAEDA, KENJI
Executed: 2008-02-08
YOKOGAWA, KENETSU
Executed: 2008-02-12
IZAWA, MASARU
Executed: 2008-02-12
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
1-24-14, NISHI SHINBASHI, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method for Venting the Same to Atmosphere
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.