Patent Assignment
Reel/Frame 026239/0864
Assignment of Assignor's Interest
Recorded: 2011-05-06
Pages: 3
Assignors
SHERO, ERIC J.
Executed: 2011-05-06
RAISANEN, PETRI I.
Executed: 2011-05-03
JUNG, SUNG HOON
Executed: 2011-05-03
WANG, CHANG-GONG
Executed: 2011-05-01
Assignee
ASM AMERICA, INC.
3440 E. UNIVERSITY DRIVE, PHOENIX, ARIZONA, 85034
Covered Property
(1)
Systems and Methods for Thin-Film Deposition of Metal Oxides Using Excited Nitrogen-Oxygen Species
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.