Patent Assignment
Reel/Frame 026249/0856
Assignment of Assignor's Interest
Recorded: 2011-05-10
Pages: 3
Assignor
KIMBA, TOSHIFUMI
Executed: 2008-12-01
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU,, TOKYO, JAPAN
Covered Property
(1)
Polishing End Point Detection Method, Polishing End Point Detection Apparatus and Polishing Apparatus