Patent Assignment
Reel/Frame 026257/0805
Assignment of Assignor's Interest
Recorded: 2011-05-11
Pages: 3
Assignor
AMANO, YOSHIFUMI
Executed: 2011-04-13
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing and Positioning Apparatus, Substrate Processing and Positioning Method and Storage Medium Recording Program for Processing and Positioning a Substrate