Patent Assignment
Reel/Frame 026258/0133
Assignment of Assignor's Interest
Recorded: 2011-05-11
Pages: 3
Assignor
AMANO, YOSHIFUMI
Executed: 2011-04-13
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Positioning Apparatus, Substrate Processing Apparatus, Substrate Positioning Method, and Computer Readable Medium Having a Program Stored Thereon