Patent Assignment
Reel/Frame 026279/0572
Assignment of Assignor's Interest
Recorded: 2011-05-13
Pages: 3
Assignors
HOLLAND, JOHN PATRICK
Executed: 2011-05-03
VENTZEK, PETER L.G.
Executed: 2011-05-11
SINGH, HARMEET
Executed: 2011-05-03
GOTTSCHO, RICHARD
Executed: 2011-05-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Semiconductor Processing System Having Multiple Decoupled Plasma Sources