Patent Assignment
Reel/Frame 026283/0630
Assignment of Assignor's Interest
Recorded: 2011-05-16
Pages: 4
Assignors
YIN, HUAXIANG
Executed: 2011-05-04
XU, QIUXIA
Executed: 2011-05-04
XU, GAOBO
Executed: 2011-05-04
MENG, LINGKUAN
Executed: 2011-05-04
YANG, TAO
Executed: 2011-05-04
CHEN, DAPENG
Executed: 2011-05-04
Assignee
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
NO. 3 BEITUCHENG WEST ROAD, CHAOYANG DISTRICT, BEIJING, 100029, CHINA
Covered Property
(1)
Method for Manufacturing Semiconductor Device