Patent Assignment
Reel/Frame 026300/0724
Assignment of Assignor's Interest
Recorded: 2011-05-18
Pages: 3
Assignors
YAMAZAKI, SHUNPEI
Executed: 2011-05-02
WATANABE, RYOSUKE
Executed: 2011-05-05
HIRAISHI, SUZUNOSUKE
Executed: 2011-05-05
SAKATA, JUNICHIRO
Executed: 2011-05-09
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device