Patent Assignment
Reel/Frame 026316/0181
Assignment of Assignor's Interest
Recorded: 2011-05-20
Pages: 11
Assignors
STEINHOFF, JENS ARNO
Executed: 2011-05-02
BANINE, VADIM YEVGENYEVICH
Executed: 2011-05-09
BRULS, RICHARD JOSEPH
Executed: 2011-04-06
LOOPSTRA, ERIK ROELOF
Executed: 2011-03-29
NEERHOF, HENDRIK ANTONY JOHANNES
Executed: 2011-03-28
VAN DIJK, ADRIANUS JOHANNES MARIA
Executed: 2011-04-11
YAKUNIN, ANDREI MIKHAILOVICH
Executed: 2011-03-23
SCACCABAROZZI, LUIGI
Executed: 2011-05-04
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Radiation Source Apparatus, Lithographic Apparatus, Method of Generating and Delivering Radiation and Method for Manufacturing a Device