Patent Assignment
Reel/Frame 026348/0909
Assignment of Assignor's Interest
Recorded: 2011-05-26
Pages: 2
Assignee
INTERMOLECULAR, INC.
3011 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Apparatus and Method for Combinatorial Gas Distribution Through a Multi-Zoned Showerhead