Assignment of Assignor's Interest

Recorded: 2011-05-26 Pages: 3

Assignor

LEE, WILLIAM D.

Executed: 2011-05-24

Assignee

AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053

Covered Property (1)

Active Dew Point Sensing and Load Lock Venting to Prevent Condensation on Workpieces

Application: 13/116,580 →

Publication: US 2011/0291030

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.