Patent Assignment
Reel/Frame 027824/0767
Second Amendment to Ipsa
Recorded: 2012-03-07
Pages: 8
Assignor
AXCELIS TECHNOLOGIES, INC.
Executed: 2012-03-05
Assignee
SILICON VALLEY BANK
3003 TASMAN DRIVE, HG 150, SANTA CLARA, CALIFORNIA, 02466
Covered Properties
(15)
Vacuum System Cold Trap Filter
RF Coupled Plasma Abatement System Comprising an Integrated Power Oscillator
Active Dew Point Sensing and Load Lock Venting to Prevent Condensation on Workpieces
Application:
13/116,580 →
Publication:
US 2011/0291030
Heated Rotary Seal and Bearing for Chilled Ion Implantation System
Matched Coefficient of Thermal Expansion for an Electrostatic Chuck
Plasma Mediated Ashing Processes
Application:
13/117,488 →
Publication:
US 2011/0226280
Effective Algorithm for Warming a Twist Axis for Cold Ion Implantations
Heated Electrostatic Chuck Including Mechanical Clamp Capability at High Temperature
Heated Annulus Chuck
Uniformity of a Scanned Ion Beam
Patent:
8,330,129 →
Application:
13/216,812 →
Automatic Control System for Selection and Optimization of Co-Gas Flow Levels
System and Method for Ion Implantation with Improved Productivity and Uniformity
Plasma Generating Apparatus and Process for Simultaneous Exposure of a Workpiece to Electromagnetic Radiation and Plasma
Application:
13/335,889 →
Publication:
US 2013/0160793
Beam Line Design to Reduce Energy Contamination
Mass Analysis Variable Exit Aperture
Application:
61/489,449 →
Related Assignments
(18)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 19, 2011
From: REYNOLDS, WILLIAM P; GREGG, JAMES; ROBITAILLE, DENIS; LEE, WILLIAM D
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026151/0256 →
Assignment of Assignor's Interest
May 6, 2011
From: SRIVASTAVA, ASEEM K; DIVERGILIO, WILLIAM F
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026236/0634 →
Assignment of Assignor's Interest
May 26, 2011
From: LEE, WILLIAM D.
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026349/0120 →
Assignment of Assignor's Interest
May 27, 2011
From: BERRY, IVAN L.; WALDFRIED, CARLO; LUO, SHIJIAN; ESCORCIA, ORLANDO
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026353/0946 →
Assignment of Assignor's Interest
Jun 7, 2011
From: LEE, WILLIAM DAVIS; COOK, GARY M.; JUSTESEN, PERRY J.I.; PUROHIT, ASHWIN M.
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026402/0488 →
Assignment of Assignor's Interest
Jun 9, 2011
From: LEE, WILLIAM D.; PUROHIT, ASHWIN M.
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026418/0791 →
Assignment of Assignor's Interest
Jun 10, 2011
From: LEE, WILLIAM D.; DIVERGILIO, WILLIAM; DRUMMOND, STEVE
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026424/0812 →
Assignment of Assignor's Interest
Jun 15, 2011
From: OTA, KAN; LEE, WILLIAM DAVIS
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026466/0506 →
Assignment of Assignor's Interest
Jun 21, 2011
From: JUSTESEN, PERRY J.I.; WEED, ALLAN D.; LEE, WILLIAM DAVIS; PUROHIT, ASHWIN M.
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026473/0001 →
Assignment of Assignor's Interest
Aug 24, 2011
From: LEE, WILLIAM
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 026801/0104 →
Assignment of Assignor's Interest
Dec 1, 2011
From: COLVIN, NEIL K; HSIEH, TSEH-JEN
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 027307/0475 →
Assignment of Assignor's Interest
Dec 13, 2011
From: EISNER, EDWARD C.; VANDERBERG, BO H.
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 027374/0900 →
Assignment of Assignor's Interest
Jan 12, 2012
From: EISNER, EDWARD C.; VANDERBERG, BO H.
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 027522/0575 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →
Assignment of Assignor's Interest
Nov 12, 2013
From: SRIVASTAVA, ASEEM K.; BERRY, IVAN
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 031580/0176 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →