Patent Assignment
Reel/Frame 026473/0001
Assignment of Assignor's Interest
Recorded: 2011-06-21
Pages: 7
Assignors
JUSTESEN, PERRY J.I.
Executed: 2011-06-03
WEED, ALLAN D.
Executed: 2011-06-06
LEE, WILLIAM DAVIS
Executed: 2011-06-03
PUROHIT, ASHWIN M.
Executed: 2011-06-07
RATHMELL, ROBERT D.
Executed: 2011-06-07
COOK, GARY M.
Executed: 2011-06-07
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Heated Electrostatic Chuck Including Mechanical Clamp Capability at High Temperature
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Second Amendment to Ipsa
Mar 7, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 027824/0767 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →