Patent Assignment
Reel/Frame 026353/0946
Assignment of Assignor's Interest
Recorded: 2011-05-27
Pages: 4
Assignors
BERRY, IVAN L.
Executed: 2011-05-24
WALDFRIED, CARLO
Executed: 2011-05-25
LUO, SHIJIAN
Executed: 2011-05-24
ESCORCIA, ORLANDO
Executed: 2011-05-24
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Plasma Mediated Ashing Processes
Application:
13/117,488 →
Publication:
US 2011/0226280
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Second Amendment to Ipsa
Mar 7, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 027824/0767 →
Assignment of Assignor's Interest
Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement
Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →