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App. No. 13/117,488 · Confirmation No. 7733

PLASMA MEDIATED ASHING PROCESSES

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2014-02-06 ABN Abandonment 2 View
2013-08-26 SA.. Supplemental Response or Supplemental Amendment 1 View
2013-08-26 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2013-08-26 DRW Drawings-only black and white line drawings 1 View
2013-08-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-08-14 CTAV Advisory Action (PTOL-303) 3 View
2013-08-14 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 11 View
2013-08-08 A.NE Response After Final Action 1 View
2013-08-08 SPEC Specification 1 View
2013-08-08 CLM Claims 4 View
2013-08-08 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2013-08-08 DRW Drawings-only black and white line drawings 1 View
2013-08-08 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-08-08 WFEE Fee Worksheet (SB06) 1 View
2013-07-09 CTFR Final Rejection 14 View
2013-07-09 892 List of references cited by examiner 1 View
2013-07-09 SRFW Search information including classification, databases and other search related notes 1 View
2013-07-09 1449 List of References cited by applicant and considered by examiner 1 View
2013-04-29 CLM Claims 4 View
2013-04-29 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2013-04-29 WFEE Fee Worksheet (SB06) 2 View
2013-04-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-04-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2013-04-29 SPEC Specification 1 View
2013-04-29 136A Authorization for Extension of Time all replies 2 View
2013-02-25 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2013-02-25 WFEE Fee Worksheet (SB06) 2 View
2013-02-25 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-02-25 TRAN.LET Transmittal Letter 5 View
2013-01-30 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-01-30 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-01-24 CTNF Non-Final Rejection 10 View
2013-01-24 892 List of references cited by examiner 1 View
2013-01-24 SRNT Examiner's search strategy and results 4 View
2013-01-24 SRFW Search information including classification, databases and other search related notes 1 View
2013-01-24 BIB Bibliographic Data Sheet 1 View
2013-01-24 1449 List of References cited by applicant and considered by examiner 3 View
2013-01-22 PA.. Power of Attorney 1 View
2013-01-22 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2013-01-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-11-07 ELC. Response to Election / Restriction Filed 1 View
2012-11-07 CLM Claims 5 View
2012-11-07 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2012-11-07 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-11-07 WFEE Fee Worksheet (SB06) 1 View
2012-10-23 CTRS Requirement for Restriction/Election 6 View
2012-10-23 FWCLM Index of Claims 1 View
2011-09-22 NTC.PUB Notice of Publication 1 View
2011-06-13 WFEE Fee Worksheet (SB06) 1 View
2011-06-13 APP.FILE.REC Filing Receipt 3 View
2011-05-27 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2011-05-27 TRAN.LET Transmittal Letter 2 View
2011-05-27 FOR Foreign Reference 43 View
2011-05-27 371P Documents submitted with 371 (National Stage) Applications 7 View
2011-05-27 371P Documents submitted with 371 (National Stage) Applications 8 View
2011-05-27 FOR Foreign Reference 1 View
2011-05-27 FOR Foreign Reference 30 View
2011-05-27 FOR Foreign Reference 14 View
2011-05-27 OATH Oath or Declaration filed 3 View
2011-05-27 SPEC Specification 38 View
2011-05-27 CLM Claims 5 View
2011-05-27 ABST Abstract 1 View
2011-05-27 DRW Drawings-only black and white line drawings 16 View
2011-05-27 WFEE Fee Worksheet (SB06) 2 View
2011-05-27 N417 Electronic Filing System Acknowledgment Receipt 4 View
2011-05-27 ADS Application Data Sheet 5 View
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Quick Facts
App. No.
13/117,488
Filed
2011-05-27
Pub. No.
US20110226280A1
Art Unit
1716